 F1 Probe Station ● 6 inches, 8 inches and 12 inches, manual, semi-automatic and fully automatic are all model F1 ● The probe station can be configured by selecting F1+futureC+instrument. ● Please call Eoulu service hotline 4008808776 for professional engineer support!
The world's first evolvable and learning probe platform system Eoulu owns 100% of intellectual property rights  New digital 3.0 system architecture designed by Eoulu Make the machine simpler and lighter The world’s smallest 12-inch probe station, only 1 meter wide Save the cost of clean room and make it easy to move  Dynamic and static map systems copyrighted and patented by Eoulu Make the machine faster and more accurate  Eoulu’s patented “Near-Zero Error (C0)” and “Virtual Ruler (VR)” technologies  The F1 architecture completely solves the current uncertainty of probe insertion on the machine in the market. It is a model that all peers will surely follow.   F1 Mechanical Performance
* When C0 and VR are enabled ** The speed at which F1 chuck moves varies depending on the chuck size chosen by the customer, the chuck construction (Coax or Triax), and whether the chuck supports high and low temperatures *** Depending on the size of the DUT, it varies under different movement accuracy requirements *** High speed and high stability cannot be achieved at the same time, and Eoulu can provide services to optimize the speed according to the customer's wafer andmeasurement application. For more information, please contact sales for hardware and software upgrade solutions **** In the case of 8-inch, room temperature, and triax chuck, F1 adopts the highest accuracy and most stable speed mode, 1000 μm * 1000 μm chip movement time ***** It varies according to the configuration and the customer's requirements for accuracy and speed. The minimum value of XY position locking can be achieved by selecting CCD, which cannot be achieved by standard CCD. ****** The standard deviation of the probe scrub mark length σ is ≤ 5μm. We can refer to the futureD product data of Eoulu to measure more than 2,000 DUTs of 8-inch wafers. Under the high-precision wafer running mode, the probe scrub mark length difference from DUT to DUT is guaranteed to be within 3σ ****** The standard deviation of the starting position of the probe mark σ is ≤ 8μm. We can refer to the futureD product data of Eoulu to measure 2000 DUTs of 8-inch wafer. Under the high-precision and low-speed wafer running mode, the difference in starting position from DUT to DUT is guaranteed to be within 3σ ****** The above data indicators are not lower than the level of peers,refer to the article published by the peer on August 22, 2022 F1 Shielding Capability
* Eoulu F1 low noise test system supports 1/f，RTS，RTN test. When purchasing low noise test probe station, plesase purchase grounding service and commissioning service * In addition to the system capability, environmental conditions should also be considered. This project is not verified on the customer side, and can be arranged to be verified in Suzhou laboratory of Eoulu * The fully-automated probe station does not have Microchamber,this parameter is not applicable ** The single-photon test requires additional shielding devices,this parameter is not applicable ** The test light path refers to the perpendicular incident light from 90° directly above the microscope ** The light shielding wavelength is 200 ~ 2000 nm F1 Vibration Isolation Capability
* For the F1 vibration isolation table related parameters, please refer to the manufacturer traceability index. This project is not verified on the customer side F1 Microscope
* The F1 probe station is available in both Large FOV and High Resolution microscope configurations, you can choose according to your test requirements ** When the CCD configuration is different, the color and magnification will be different ** When the objective lens is different (5X, 10X, 20X, 50X, 100X), the magnification will be different *** When the lens configuration is different, the resolution will be different F1 Chuck
* Users can choose in these temperature ranges according to test requirements ** For other temperature ranges, please contact Eoulu's sales ** The larger the temperature range, the higher the purchase cost. Testing below room temperature requires cooling, and the lower the temperature, the higher the purchase cost. Please select the appropriate temperature range according to the actual test requirements ** Automatic wafer testing in high and low temperature,it is recommended to use motorized positioners *** Measured in 20°C~24°C , 40%~50% humidit *** High voltage and high current cannot be reached at the same time *** Higher voltage or higher current need to be customized F1 Control Software future interface (futureI)
* Eoulu copyright F1 Dimensions and Weight
* These dimensions include the adjustable stands for LCD, mouse and keyboard. The dimensions are only typical values. ** These dimensions include the adjustable stands for LCD, mouse and keyboard, and the tricolor light. The dimensions are only typical values.
* Refer to Generic vibration criteria for vibration-sensitive equipment ** Refer to the international standard ISO 14644-1 *** According to the requirements of the national standard GB/T 156-2007 **** According to the requirements of the international standard ISO8573-1 ***** Refer to the international standard ISO 14743:2020 ***** For the positions of interfaces CDA 1, CDA 2, VAC 1 and VAC 2, see the following CDA and VAC Connectors diagram ****** Measured in laboratory at Standard Ambient Temperature And Pressure (SATP). For more information on CDA pressure and flow, please consult Eoulu F1 Service Center *
* For details of service quotation, please contact Eoulu's sales. Product parameters are subject to change without prior notice.All product images are subject to the actual products, and Suzhou Eoulu System Integration Co., Ltd. reserves the interpretation right for the content.
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